Simulation Station - Beamer
The Simulation Station - Beamer is a specialized tool used for simulating and optimizing electron beam lithography (E-beam) processes. It enables researchers and engineers to design, visualize, and refine complex patterns before actual fabrication, ensuring accuracy and efficiency. By simulating electron beam interactions with materials, the Beamer station helps predict potential issues, such as proximity effects or resist behavior, allowing for adjustments in pattern design and process parameters. This simulation capability reduces errors, saves material costs, and improves overall throughput in microfabrication and high-precision applications.
Edmond J. Safra (Givat-Ram)
Nano Center
Contacts
- Golan Tanami
- golant@savion.huji.ac.il